Electronic Cleanroom Tunnel Furnace
The Electronic Cleanroom Tunnel Furnace is a continuous high-cleanliness heat treatment system specially designed for industries such as semiconductor manufacturing, electronic components, LCD displays, and 5G communication equipment production.The equipment is usually integrated with automated cleanroom production lines. It adopts a fully enclosed structure and an advanced filtration system to ensure that materials remain in a dust-free environment meeting Class 100 (ISO 5) or higher standards during high-temperature processing. It enables efficient and continuous drying, curing, and aging processes.
Applications
Chip Packaging:
Used for semiconductor chip curing and drying after dispensing processes.
PCB Manufacturing:
Used for thermal curing of PCB/FPC circuit boards and drying of solder mask coatings.
Display Manufacturing:
Used for process baking of LCD/OLED panels and curing of backlight modules.
Electronic Components:
Used for high-temperature aging and precision drying of capacitors, resistors, and various sensors.
Product Parameters
| Parameter | Technical Specifications |
|---|---|
| Working Temperature | Room temperature ~ 300℃ (customizable up to 450℃) |
| Cleanliness Class | Class 100 (ISO 5) / Class 10 (ISO 4) |
| Temperature Control Accuracy | Temperature uniformity in the constant temperature zone: ≤ ±1.5℃ |
| Conveying Methods | PTFE mesh belt / Stainless steel mesh belt / Chain roller conveyor / Belt conveyor |
| Conveying Speed | 0.1 ~ 5 m/min (variable frequency stepless speed adjustment) |
| Heating Power Supply | AC 380V, 3-phase, 50Hz |
Features
Ultra-High Cleanliness:
Equipped with HEPA/ULPA high-efficiency filters. The internal chamber adopts fully welded stainless steel construction to effectively prevent dust generation and contamination.
Precise Temperature Control:
Adopts intelligent microcomputer PID temperature control combined with multiple independent heating zones, ensuring highly uniform heat distribution inside the furnace.
Energy Efficient:
High-density rock wool insulation combined with a hot air circulation system significantly reduces heat loss and improves energy efficiency.
Intelligent Safety Protection:
Equipped with over-temperature alarm, conveyor jam protection, transmission chain break protection, and automatic cooling system to ensure safe and stable operation.
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